1
record (ai, "FHIPHOTONSTM:NI6009:MainChamber")
2
{
3
field(EGU, "mbar")
4
}
5
record (ai, "FHIPHOTONSTM:NI6009:ForeVacuum")
6
7
8
9
record (ai, "FHIPHOTONSTM:NI6009:PrepChamber")
10
11
12