record (ai, "FHIPHOTONSTM:NI6009:MainChamber") { field(EGU, "mbar") } record (ai, "FHIPHOTONSTM:NI6009:ForeVacuum") { field(EGU, "mbar") } record (ai, "FHIPHOTONSTM:NI6009:PrepChamber") { field(EGU, "mbar") }