1 record (ai, "FHIPHOTONSTM:NI6009:MainChamber")

     2 {

     3   field(EGU, "mbar")

     4 }

     5 record (ai, "FHIPHOTONSTM:NI6009:ForeVacuum")

     6 {

     7   field(EGU, "mbar")

     8 }

     9 record (ai, "FHIPHOTONSTM:NI6009:PrepChamber")

    10 {

    11   field(EGU, "mbar")

    12 }